JPS61156736U - - Google Patents

Info

Publication number
JPS61156736U
JPS61156736U JP4008185U JP4008185U JPS61156736U JP S61156736 U JPS61156736 U JP S61156736U JP 4008185 U JP4008185 U JP 4008185U JP 4008185 U JP4008185 U JP 4008185U JP S61156736 U JPS61156736 U JP S61156736U
Authority
JP
Japan
Prior art keywords
coil spring
coil
mounting structure
contact
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4008185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313636Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4008185U priority Critical patent/JPH0313636Y2/ja
Publication of JPS61156736U publication Critical patent/JPS61156736U/ja
Application granted granted Critical
Publication of JPH0313636Y2 publication Critical patent/JPH0313636Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Springs (AREA)
JP4008185U 1985-03-20 1985-03-20 Expired JPH0313636Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4008185U JPH0313636Y2 (en]) 1985-03-20 1985-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4008185U JPH0313636Y2 (en]) 1985-03-20 1985-03-20

Publications (2)

Publication Number Publication Date
JPS61156736U true JPS61156736U (en]) 1986-09-29
JPH0313636Y2 JPH0313636Y2 (en]) 1991-03-28

Family

ID=30548639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4008185U Expired JPH0313636Y2 (en]) 1985-03-20 1985-03-20

Country Status (1)

Country Link
JP (1) JPH0313636Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3565496B2 (ja) * 2000-04-13 2004-09-15 イビデン株式会社 セラミックヒータ、静電チャックおよびウエハプローバ

Also Published As

Publication number Publication date
JPH0313636Y2 (en]) 1991-03-28

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